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SMS CASI Scatterometer

Lambda Research Corporation resells the CASI® scatterometer from SMS, the leader in light scatter measurement technology. The CASI is the finest angle resolved BRDF instrument available. The SMS CASI Scatterometer uses laser light from UV to IR as a nondestructive probe to measure surfaced quality, optical performance, smoothness, appearance, defects, and contamination on a wide variety of materials.

The sample is mounted on stages capable of moving in X and Y and/or rotation. The incident angle can be set to any angle up to 85° from surface normal. The detector sweeps around the sample in the incident plane measuring scattered and specular light. During the scan, the computer controls gain, filter, and aperture changes through user-defined parameters. The instrument background is measured separately and can be compared to the sample data.

The CASI Analysis Software simplifies analysis of scatter data. BRDF values are used to calculate TIS, Total Hemispherical Reflectance, PSD, and RMS roughness. Annotated results print on the HP PaintJet printer as viewgraphs or publication ready figures.

You can download the complete specfications on the CASI scatterometer here.

Request an official quote from our technical sales personnel by clicking here.

Applications
  • Optical surfaces
  • Diffuse materials
  • Semiconductor wafers
  • Magnetic storage media
  • Precision machined surfaces
  • Cosmetic appearance

Printable version
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